According to the company, the new technology combines higher brightness - previously available only with more complex cold field emission - with the high, ultra-stable current of thermally-assisted field emission. The combination provides significant improvements in resolution, speed, sensitivity and ease of use to the Titan - a commercially-available microscope. Initial shipments of the new source are planned for the first quarter of 2009.
"The X-FEG's combination of high-brightness and high-stability beam current provides benefits to users at all levels over the full spectrum of TEM applications," said Dr. Rob Fastenau, FEI's executive vice president, marketing and technology. "For all users, it increases throughput, improves resolution without adding complexity to the optical system, and eliminates cleaning and maintenance procedures required by cold field emitters. For those using spherical aberration correctors and/or monochromators, it provides additional gains in resolution, precision and sensitivity. In the most advanced uses, the X-FEG can be combined with sophisticated experimental technologies, such as chromatic or spherical aberration correctors or low accelerating voltages, to explore the ultimate limits of S/TEM performance."
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