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Using the PiVot system, Applied Materials said that FPD manufacturers can transition from aluminum to copper bus lines to achieve faster pixel response and lower power consumption in next-generation LCD-TV panels. The PiVot system delivers copper deposition performance by combining high deposition rates, efficient target utilization and long maintenance intervals with enhanced film morphology, according to the company.
Key to the PiVot system's film quality is its proprietary rotary cathode design that employs deposition modulation technology to deposit copper layers with uniform grain distribution, low resistivity and high thickness uniformity. The PiVot system also enables greater than 80 percent target utilization to provide savings in expensive target material.
"By providing unmatched film properties and efficient raw material utilization, our AKT-PiVot system answers the critical needs of today's LCD TV market that is driven by demand for larger and ultra-high definition panels and requires innovations in deposition technology to deliver high-quality films at a low cost-of-ownership," said Dr. Mark Pinto, senior vice president and general manager of Applied's Display, and Energy and Environmental Solutions groups. "The system's proven productivity and proprietary copper process technology create a powerful addition to our strong portfolio of FPD solutions."
Applied Materials reported that the PiVot system's modular architecture enables a large variety of configurations to maximize production efficiency, eliminating the bottlenecks caused by different process times in different modules in a traditional in-line machine. The PiVot system's cluster-like arrangement also allows continuous operation during individual module maintenance.
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